真空技术装备国家工程实验室

发稿时间:2020-04-10浏览次数:12

真空技术装备国家工程实验室(简称“工程实验室”),建设项目于20081118日获国家发改委正式(“发改办高技[2008]2646号”)批准成立,是目前我国真空领域唯一的国家工程实验室。该工程实验室旨在围绕大规模集成电路、高性能材料等产业对先进真空装备的需求,开展洁净真空获得、洁净真空部件制备、洁净真空密封等研究,突破典型重大关键装备及成套工艺、核心零部件与子系统制备技术,研制先进真空技术成套装备,提高我国真空技术领域的国际竞争力。近年来,承担国家科技重大专项(02专项/04专项)、国家重点研发项目、国家科学仪器重大专项、国家自然科学基金项目以及省(部)、市等科技项目110多项,发表论文500多篇,授权专利400多项,起草技术标准10余项,40多项成果应用转化生产。

该实验室的主要功能包括,为以洁净真空技术为基础的先进真空技术装备发展提供共性技术创新的中间实验验证平台;成为实现应用基础研究与产业化有机衔接的桥梁和纽带。建立工程实验室,在国家层面上构建真空技术装备的技术创新和技术支撑体系,为集成电路、生物医药、高性能材料、重大科学装置等重点产业发展提供支撑和服务,并为真空产业发展提供具有自主知识产权的长期的技术保障,满足我国真空产业的长期发展以及国家战略需求。

工程实验室实行理事会领导下的实验室主任负责制,该工程实验室的法人单位是中科院沈阳科仪股份有限公司,共建单位是北京中科科仪股份有限公司,东北大学和中国科学技术大学是该项目的合作单位。作为该工程实验室的重要组成部分,东北大学建设有真空干泵理论验证平台、真空与表面应用实验室、真空干泵集成测试平台、真空干泵自主设计与理论分析平台等实验平台。我校机械工程与自动化学院巴德纯教授,是该国家工程实验室的主要学术带头人,刘坤教授、王晓冬教授担任该工程实验室学术委员会委员。

理事会理事单位包括:辽宁省发改委、沈阳市发改委、中科院计划财务局、中科院高技术局、中科院沈阳科仪股份有限公司、北京中科科仪股份有限公司、中国科技大学、东北大学、沈阳真空技术所、北京北方微电子基地设备工艺研究中心有限公司。工程实验室下设运营管理部、知识产权办公室、标准化办公室以及项目组。实验室拥有一支实力雄厚、结构合理、具有国际影响的研究队伍,通过实施创新、开放、共赢的产学研长效合作机制,将进一步加快突破重点产业发展的瓶颈制约。


Brief Introduction

National Engineering Laboratory of Vacuum Technology Equipments

National Engineering Laboratory of Vacuum Technology Equipments (Engineering Laboratory) was established on November 18th, 2008, which has been approved by the National Development and Reform Commission ([2008] No.2646). It is the only national engineering laboratory in the vacuum field in China. The engineering laboratory aims to focus on the demand of advanced vacuum equipment in industries such as Large Scale Integrated Circuits and high-performance materials to carry out the research on clean vacuum acquirements, clean vacuum component preparation, and clean vacuum sealing. We aim to break through the key major equipment and complete sets of process, core components and subsystems preparation technology, and develop advanced vacuum technology complete equipment, improving the international competitiveness in the field of vacuum technology in China.

The main function of the laboratory includes the provision of intermediate experimental verification platforms for the development of advanced vacuum technology equipment based on clean vacuum technology, which has become a bridge and link for the application of basic research and industrialization. Establishing the engineering laboratory and building technical innovation and support system for vacuum technology equipment at the national level provide support and services for the development of key industries such as integrated circuits, biopharmaceuticals, high-performance materials, and major scientific equipment, which also provides independent intellectual property rights for the development of vacuum industries to meet the long-term development of vacuum industry and the national strategic need.

The engineering laboratory implements the director responsibility system under the leadership of the board of directors. The impersonal entity of the engineering laboratory is the SKY Technology Development Co., Ltd. Chinese Academy of Sciences. The co-construction unit is the KYKY Technology Co., Ltd. Northeastern University and University of Science and Technology of China are cooperating units of the project. As an important part of the engineering laboratory, Northeastern University has established experimental platforms such as the dry vacuum pump theoretical verification platform, the vacuum and surface application laboratory, and the dry vacuum pump integrated test platform. Dechun Ba, professor of Mechanical Engineering and Automation in our school, is the chief academic leader of the national engineering laboratory. Yichen Zhang and Kun Liu serve as members of the academic committee of the engineering laboratory.

Board members include: Liaoning Provincial Development and Reform Commission, Shenyang Municipal Development and Reform Commission, Chinese Academy of Sciences Planning and Finance Bureau, Chinese Academy of Sciences High Technology Bureau, SKY Technology Development Co., Ltd. Chinese Academy of Sciences, KYKY Technology Co., Ltd., University of Science and Technology of China, Northeastern University, Shenyang Vacuum Technology Research Institute, Beijing North Microelectronics Equipment Research Center Co., Ltd. The engineering laboratory has the operation management department, the intellectual property office, the standardization office, and the project team. The laboratory has a research team with strong strength, reasonable structure and international influence. Through the implementation of a long-term cooperation mechanism with innovation, open, and win-win, it will further break through the bottleneck restriction in the development of key industries.